China begins mass producing domestic DUV lithography machines

China has started mass producing domestically developed immersion deep-ultraviolet (DUV) lithography machines, a critical step in reducing reliance on foreign technology. The machines are produced by state-backed Aishengna, which plans to make about five units this year and 20 in 2027. The tools will be delivered to Chinese chipmakers including SMIC, Hua Hong, and CXMT. While still less advanced than ASML's models, the development provides an alternative amid Western export restrictions.